Field emission scanning electron microscope (including spectrometer) (JSM-7900F)

Scanning electron microscope: 1. Resolution: Secondary electron image: ≤ 0.6 nm (15 kV), ≤ 0.7 nm (1 kV)，≤1.0 nm（0.5 kV）； Analysis mode resolution: ≤ 3.0 nm（WD=10 mm，5 kV，5 nA）

2. Acceleration voltage: 0.01-30 kV continuously adjustable

3. Beam range: 1 pA to 500 nA, continuously adjustable

4. Magnification ratio 25X -1000000X; The magnification can be continuously adjusted in coarse and fine modes, with automatic and precise correction and compensation functions that vary with the working distance or acceleration voltage

Energy spectrum: 1 detector: silicon drift probe, crystal active area ≥ 40 mm2

2 ultra-thin windows, bipolar electronic cooling

3-element analysis range Be 4-Cf 98

4 Energy resolution: Mn K α better than 127 eV@50 , 000 CPS

5. Peak stability: 1000 CPS to 100000 CPS, Mn K α resolution variation and peak drift less than 1 eV, peak drift less than 1.5 eV within 48 hours